1Cr18Ni9Ti不锈钢表面Al_2O_3阻氚涂层磁控溅射-微弧氧化法制备技术研究

Preparation of alumina tritium permeation barrier coating on 1Cr18Ni9Ti stainless steel by magnetron sputtering and micro-arc oxidation

采用磁控溅射技术在1Cr18Ni8Ti不锈钢表面制备出铝镀层,并对其进行微弧氧化处理,获得了氧化铝阻氚涂层。采用XRD,SEM表征涂层的结构和形貌。结果表明,磁控溅射制备的铝镀层非常致密,微弧氧化得到的氧化铝涂层由外层的疏松层和内层的致密层组成,微弧区瞬间高温烧结作用使微弧氧化膜具有晶态氧化物陶瓷相结构。氧化铝涂层由α-Al_2O_3相和γ-Al_2O_3相组成,冷却速率大,外层形成γ-Al_2O_3相,由于外层γ-Al_2O_3包覆和热扩散阻挡作用,内层的氧化铝冷却速度小,生成稳态相α-Al_2O_3的含量增加,随着涂层厚度增加,α-Al_2O_3相含量提高。

Aluminium coating was prepared on stainless steel by magnetron sputtering technology.The alumina coatings were synthesized by micro-arc oxidation technology at different arc starting voltage and processing time.The film surface morphology and structure were investigated by SEM and XRD.The results show that the aluminium films are compact and smooth.The alumina coatings are composed of inner compact layer and outer loose one.The outer layer isγ-Al2O3 due to the high cooling rate.The inner layer isα-Al2O3 because of the low cooling rate caused by the heat preservation of outerγ-Al2O3.The coatings are the mixture of α-Al2O3 and γ-Al2O3.The content ofα-Al2O3 is increased with the coatings thickness increasing.