罗兰光栅在光谱仪中对接收能量的影响分析

The analysis of Rowland grating affecting the reception of energy in spectrometer

罗兰光栅作为罗兰光栅光谱仪的核心分光元件对整个仪器至关重要,罗兰光栅在制造和使用过程中主要存在刻线误差、光栅的曲率半径误差和定位误差。采用光线追迹的办法分析罗兰光栅的各种误差对罗兰光栅光谱仪接收能量的影响。结果表明：曲率半径误差对Ⅳ型罗兰光栅光谱仪影响较小,刻线误差必须控制在-0.2-0.15l/mm刻线以内,x方向定位误差严格控制在-0.055-0.025mm之间,y方向定位误差控制在-0.03-0.015mm之间,罗兰光栅光谱仪对光栅绕z轴旋转误差最为敏感,控制在10-3度量级。通过对罗兰光栅误差的分析,为罗兰光栅光谱仪的高效利用和研制奠定了基础。

Photoelectric optical spectrometer emission spectrometer is an important test equipment of spectral analysis and it is one of the most effective tools for emission spectral analysis currently. As the core of the light splitting device of Roland grating spectrometer, Rowland grating is very important to the whole instrument. There are mainly three kinds of errors in manufacturing and using including the line error, radius error, position error. The computer software simulation and mathematical calculation are used to analyze the topic and give a comprehensive analysis of the effects of the all errors on the Roland grating spectrometer. The results show that curvature radius error has no significant effect on modified Rowland grating spectrometer, the line error must be controlled within the root --0. 2-0. 15 reticle; X orientation error is in between the -0. 055-0.025, Y orientation error is in between -0.03-0.015ram, that Rowland grating spectrom- eter of rotation about the z-axis is particularly sensitive is controlled in the order of 10.3. Through the analysis of the error of the grating, it is the basis for the efficient use and development of the grating spectrometer and it will lay the foun- dation for developing and efficient using of the Roland grating spectrometer.