湿法多孔硅去除工艺优化研究

Study on the Optimization of Wet Porous Silicon Removal Process

通过优化湿法工艺,可保证有效去除多孔硅,提高太阳能电池片合格率。从对酸槽药液配比、碱槽药液浓度及自动配比、碱刀流量及位置、机械手抓片位置调整及辅助动作的优化等方面,探讨了湿法多孔硅去除工艺的优化。

Optimizing the wet process can ensure the effective removal of the porous silicon to improve solar cell yield. This paper discussed the optimization of wet porous silicon removal process from the liquid ratio of acid tank, liquid concentration and automatic ratio of alkali tank, alkali knife flow and position, mechanical grasping sheet position adjustment and assistance operation optimization, etc.