Surface morphology of refractive-index waveguide gratings fabricated in polymer films

The characteristic modifications are reported on the surface of polymeric waveguide film in the process of vol- ume-grating fabrication. The light from a mode-locked 76 MHz femtosecond laser with pulse duration of 200 fs and wavelength of 800 nm is focused normal to the surface of the sample. The surface morphology modifications are as- cribed to a fact that surface swelling occurs during the process. Periodic micro-structure is inscribed with increasing incident power. The laser-induced swelling threshold on the grating, which is higher than that of two-photon initiated photo-polymerization （TPIP） （8 mW）, is verified to be about 20 mW. It is feasible to enhance the surface smoothness of integrated optics devices for further encapsulation. The variation of modulation depth is studied for different values of incident power and scan spacing. Ablation accompanied with surface swelling appears when the power is higher. By ootimizing the laser carvinR oararneters, hizhly efficient grating devices can be fabricated.