摘要
A novel design of a two-axis fast steering mirror(FSM) with piezoelectric actuators is proposed for incoherent laser beam combination. The mechanical performance of the FSM is tested. The results show that the tilting range of the mirror is about 4 mrad, and the 1st-order resonance frequency is about 250 Hz. A self-designed grating encoder is taken as the sensor, which ensures the optimal precision of 10 μrad. The novel mechanical design can meet the requirement of engineering in incoherent laser beam combination.
A novel design of a two-axis fast steering mirror（FSM） with piezoelectric actuators is proposed for incoherent laser beam combination. The mechanical performance of the FSM is tested. The results show that the tilting range of the mirror is about 4 mrad, and the 1st-order resonance frequency is about 250 Hz. A self-designed grating encoder is taken as the sensor, which ensures the optimal precision of 10 μrad. The novel mechanical design can meet the requirement of engineering in incoherent laser beam combination.
基金
supported by the Technology Project of Changchun City(No.2013270)
