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Fast and uniform growth of graphene glass using confined-flow chemical vapor deposition and its unique applications 被引量:5

Fast and uniform growth of graphene glass using confined-flow chemical vapor deposition and its unique applications
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摘要 Fast and uniform growth of high-quality graphene on conventional glass is of great importance for practical applications of graphene glass. We report herein a confined-flow chemical vapor deposition (CVD) approach for the high- efficiency fabrication of graphene glass. The key feature of our approach is the fabrication of a 2-4 μm wide gap above the glass substrate, with plenty of stumbling blocks; this gap was found to significantly increase the collision probability of the carbon precursors and reactive fragments between one another and with the glass surface. As a result, the growth rate of graphene glass increased remarkably, together with an improvement in the growth quality and uniformity as compared to those in the conventional gas flow CVD technique. These high-quality graphene glasses exhibited an excellent defogging performance with much higher defogging speed and higher stability compared to those previously reported. The graphene sapphire glass was found to be an ideal substrate for growing uniform and ultra-smooth aluminum nitride thin films without the tedious pre-deposition of a buffer layer. The presented confined- flow CVD approach offers a simple and low-cost route for the mass production of graphene glass, which is believed to promote the practical applications of various graphene glasses. Fast and uniform growth of high-quality graphene on conventional glass is of great importance for practical applications of graphene glass. We report herein a confined-flow chemical vapor deposition (CVD) approach for the high- efficiency fabrication of graphene glass. The key feature of our approach is the fabrication of a 2-4 μm wide gap above the glass substrate, with plenty of stumbling blocks; this gap was found to significantly increase the collision probability of the carbon precursors and reactive fragments between one another and with the glass surface. As a result, the growth rate of graphene glass increased remarkably, together with an improvement in the growth quality and uniformity as compared to those in the conventional gas flow CVD technique. These high-quality graphene glasses exhibited an excellent defogging performance with much higher defogging speed and higher stability compared to those previously reported. The graphene sapphire glass was found to be an ideal substrate for growing uniform and ultra-smooth aluminum nitride thin films without the tedious pre-deposition of a buffer layer. The presented confined- flow CVD approach offers a simple and low-cost route for the mass production of graphene glass, which is believed to promote the practical applications of various graphene glasses.
出处 《Nano Research》 SCIE EI CAS CSCD 2016年第10期3048-3055,共8页 纳米研究(英文版)
基金 This work was financially supported by the National Basic Research Program of China (Nos. 2016YFA0200103, 2013CB932603, 2012CB933404, and 2013CB934600), the National Natural Science Foundation of China (Nos. 51520105003 and 51432002), the Ministry of Education (No. 20120001130010), and the Beijing Municipal Science and Technology Planning Project (No. Z151100003315013).
关键词 graphene glass confined-flow chemicalvapor deposition transparent heating device epitaxial A1N film graphene glass,confined-flow chemicalvapor deposition,transparent heating device,epitaxial A1N film
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