BTZ-3100型探针台承片台系统的改进研究

The Improvement of Motion System to the BTZ-3100 Probe Station

BTZ-3100型自动探针台是半导体芯片测试的高精密仪器,其中运动系统是该分选设备的一个重要结构。结合客户在使用过程的反馈意见,总结了运动系统存在的一些问题:主要包括z轴升降台运动导致的芯片划伤,以及u轴旋转轴的旋转精度不够。针对这两个问题,主要更改了z轴升降台的软件控制方式,同时改进了u轴的机械结构,优化了机械运动和软件控制的配合方式,并且对改进后的结构进行了实际测试,测试结果显示探针台运动系统的精确性和稳定性得到了提高,设备运行过程中出现的划伤问题和对齐精度不高的问题都得到了很好的解决。

The BTZ-3100 automatic probe station is the high precision instruments of semiconductor chip testing, and the motion system is an important structure of the sorting equipment. To improve the accuracy and stability of the motion system, the article summarizes some problems of the motion system and puts forward the improvement method in combination with the feedback message of the customers in the use of equipment, mainly includes the chip scratches caused by the z axis movement, and the less high alignment accuracy caused by insufficient rotation accuracy of u axis. To solve these problems, the way of the software control of z axis is changed,, at the same time the mechanical structure of u axis is improved, all the methods can optimize the way of the cooperation of mechanical movement and the software control, the improved structure has carried on the actual test, the test results show that the accuracy and stability of the probe＇s motion system are improved, the problems of scratch and false-positive in the process of equipment operation are well solved.