微小型静电泵的设计(3)

Design of micro and small electrostatic pumps(3)

分别详细介绍了微型泵、大流量泵和串接双泵的设计原理及方法,给出了不同状态下参数计算的详细步骤,并绘制出系列图和表格直接应用于微型泵、大流量泵及串接双泵设计。另外还讨论了用不锈钢代替钛作为激励膜的处理方案,描述了串接双泵抽液和出液状态,并阐述了串接双泵的提压原理。因为静电泵的上腔高度明显影响泵膜的抽压力,所以本设计的意义在于如何给上腔充压,泵膜将向下鼓起,可防止碰壁短路现象。特别是膜鼓起量比较大的大容量泵。全文阐述的理论和提供的图、表为微型泵、大流量泵和串接双泵的参数设计提供了实际数据,为静电泵设计者提供示例,以作比较参考。

The design principles and methods of micro pump, high-capacity pump and series double pump are introduced in detail in this part of the paper. The detailed calculation steps of parameters under different conditions are given. The related serial charts are presented, which can be used directly in the design of the pumps. Moreover, the treatment scheme how to use stainless steel instead of titanium as excitation membrane is discussed. The pump-in and pump-out states of series double pump are described, and the boosting pressure principle of series double pump is explained too. The height of upper chamber in electrostatic pump affects the suction pressure on the pump membrane significantly, so the key point of this design is to discuss how to inflate the upper chamber to make the membrane bulged downwardly so as to prevent short circuit phenomenon caused by excitation membrane touching top wall, particularly for high-capacity pump with membrane bulged largely. According to the theory introduced and the charts, tables presented in whole paper,actual parameters for micro-pumps, high-capacity pumps and the series double pumps are provided to achieve the required purpose, Some examples are also provided for the designers to compare them as references.