航空微机电系统非硅材料微纳加工技术

Micro/Nano Fabrication Technology of Non-Silicon Material for Aeronautical MEMS Systems

随着对航空飞行器智能控制的迫切需求,硅基微机电系统MEMS(Micro-electromechanical Systems)传感器和执行器难以满足飞行器恶劣的运行环境,因而以碳化硅、氮化铝等为代表的多种MEMS特种材料被不断研究和使用。概述这些特种材料的机电特性有利于缩小特种传感器研发的材料选择范围;而针对兼具机械和电学两方面应用的碳化硅、氮化铝和聚合物前驱体陶瓷开展微纳加工技术的综述,有利于全面了解这3种材料的成型成性关键工艺,进而揭示从航空特种材料到MEMS器件的加工技术发展规律,为普遍使用电信号的航空特种传感器的研发提供加工手段借鉴。

With the urgent demand for intelligent control of air vehicle, silicon-based MEMS sensors and actuators are diffi cult to meet the requirements of the harsh running environment, so various kinds of MEMS specialty materials, such as Si C, Al N and polymer derived ceramics are constantly studied and used. The mechanical and electrical properties of these specialty materials are summarized to reduce the scope of material selection for the special sensor research and development. Therefore, carrying out a review of the micromachining is conducive to a comprehensive understanding of the key process of formability of the three materials. And then, the laws from specialty materials of aviation to development of processing technology of MEMS devices would be revealed and the means for reference of the research and development of the general aviation special sensor which using electrical signals would also be provided in this paper.