摘要
本文研究一种基于迈克尔逊干涉原理对玻璃厚度进行测量的方法。测量装置采用1550nm宽带光作为探测光源,样品前后表面反射回来的微弱探测光与直线电机反射回来的参考光结合,产生干涉信号,利用光外差探测的方法进行光电转换。电信号预处理之后输到计算机,对测量数据进行进一步计算,得出玻璃厚度参数。本仪器测量精度高,速度快,成本低,是镜片厚度非接触测量很好的实现方案。
A method based on the Michelson interference is used to measure the thickness of the glass. A 1550nm broadband light is used as the detection light source. The weak probe light reflected from the glass samples before and after the surface and the reference light from the linear motor interference, and is performed using optical heterodyne detection method. With the computer, the measured data are calculated, and the glass thickness parameters are obtained. With high precision, high speed and low cost, it is a good method to realize the non-contact measurement of the lens thickness.
作者
李兆发
繆耀军
朱必锋
韩定安
曾亚光
Li Zhaoja Miao Yaojun Zhu Bifeng Han Dingan Zeng Yaguang(Foshan University School of Physics and Optoelectronic Engineering, Guangdong, Foshan,528000, Chin)
出处
《仪器仪表用户》
2016年第10期5-7,共3页
Instrumentation
基金
国家自然科学基金(11474053)
2016年度广东大学生科技创新培育专项资金(pdjh2016b0530)
关键词
非接触测量
宽带光
低相干光干涉
光外差探测
non-contact measurement
broad-band-light-source
low coherence interference
optical heterodyne detection
