Mg/SiC反射式宽带多层膜偏振片设计及分析

Design and Analysis of Mg/SiC Multilayer Broadband Reflection Polarizer

利用遗传算法设计了工作在27.5-30.5nm、26.5-31.5nm和25.5-32.5nm波段的Mg/SiC反射式宽带多层膜偏振片.性能参数显示,宽带偏振片在拓展了带宽的同时能够保证较高的偏振度并且能够获得更大的有效积分通量.分析了粗糙度及厚度控制偏移对宽带偏振片性能的影响.分析结果显示,粗糙度及厚度偏移对s光反射率的影响大于对偏振度的影响.

Mg/SiC multilayer reflection polarizers designed with wide wavelength ranges of 27. 5-30. 5 nm,26.5-31.5 nm and 25.5-32.5 nm at incidence angle of 40.8 were developed using fitness function with genetic algorithm. Performance parameter showed that the broadband polarizer could not only increase the bandpass but also maintained high performance of s-reflection output and polarization at the same time. The influences on polarizer characteristics of roughness and thickness deviation were analyzed and compared. Both the influences of roughness and of thickness deviation were higher on the polarization than on the s-reflection output.