激光裂解液态聚二甲基硅氧烷制备硅氧碳陶瓷涂层

SiOC Ceramic Coating Prepared by Laser Pyrolysis Liquid Polydimethylsiloxane

以液态聚二甲基硅氧烷(PDMS)为前驱体,采用CO_2激光扫描PDMS膜制备硅氧碳(SiOC)陶瓷涂层。通过扫描电子显微镜、热重-差示扫描量热法、红外光谱、X射线衍射和X射线光电子能谱分析了激光裂解PDMS产物的组成与结构。结果表明:激光裂解PDMS可在非平衡状态下快速制备出由晶态Si C、非晶态SiO_2和少量硅有机物组成的陶瓷涂层。激光功率对所制备陶瓷涂层的组成和结构有明显影响。随着激光功率的逐渐增加,陶瓷涂层中有机物含量呈下降趋势,但对晶态Si C的形成产生不利的影响。

Silicon-oxygen-carbon ceramic coating was prepared by a CO2 laser pyrolysis method using liquid polydimethylsiloxane （PDMS） as a precursor. The composition and structure of coating by laser pyrolysis PDMS were analyzed by topography instrument, differential scanning calorimetry, infrared spectroscopy, X-ray diffraction and X-ray photoelectron spectroscopy, respectively. The results show that the ceramic coating can be prepared quickly by laser pyrolysis PDMS. The coating prepared by laser pyrolysis PDMS is composed of amorphous SiO2, crystalline SiC and （Si（CH3）2-O-）n. The laser power has an influence on the composition and structure of the ceramic coatings. It is indicated that the content of organic matter in ceramic coating could decrease and the amorphous SiC could increase as laser power increases.