摘要
在半导体行业,空气中的悬浮气态分子污染物对于制程的潜在危害越来越受到人们的重视。目前,在通风系统中使用化学过滤器是去除AMC的主要方法之一。结合工程实例,介绍了半导体行业在新风处理单元中加装化学过滤器的实际效果。
In the semiconductor industry, the potential harmfulness of the airborne molecular contaminants to the processing procedure has been paid more and more attention. At present,chemical filters are the primary components which are used to control AMC in the ventilation system. With a project example, introduces the actual effect of chemical filters in the fresh air purification system.
出处
《洁净与空调技术》
2016年第3期81-84,共4页
Contamination Control & Air-Conditioning Technology
