氧化锆及钼金属热场对蓝宝石泡生法的影响

Effect of Thermal Field of the Zirconium Oxide and Molybdenum on the Sapphire Crystals by Kyropulos Method

蓝宝石晶体以优越的综合性能被广泛用于军事及半导体衬底材料领域。泡生法是制造大尺寸蓝宝石晶体的主要方法,但其传统热场结构的低效率制约了晶体直径的增加。基于氧化锆陶瓷和钼金属材料设计了新型层状热场,并实验考察它们不同的内外组合形式对蓝宝石晶体生长过程中保温效率的影响。结果表明当热场结构以氧化锆陶瓷内置、钼金属外置进行组装时可有效降低电能损耗;基于新型热场蓝宝石晶体生产良率高达81%,表明所设计热场的合理性。

Sapphire crystal has widely used in the military and semiconductor fields for its superior properties. Kyropoulos method is the mainstream method to achieve this aim, however, the low efficiency of the traditional thermal field limits the crystal diameter increase. In this study, a multilayer thermal field of the Zirconia and the molybdenum metal was designed, and its insulation efficient of the different assemble patterns were studied and estimated with each other. The results present that the thermal filed with the pattern of the Zirconia-inner and molybdenum-outer can effectively reduce the power loss. The choiceness of the sapphire crystal with the designed thermal field reaches 81% , which verified the validity of the designed thermal field.