基于对称型柔顺铰链的三自由度微定位平台设计与分析

Design and Analysis of 3-DOF Micro-positioning Stage Based on Symmetric Compliant Hinge

通过对一种新型柔顺铰链进行分析,设计一种基于对称型柔顺铰链的三自由度微定位平台。首先,采用ANSYS有限元方法,对一种新型柔顺铰链的输入力和输出位移间的关系进行分析。根据分析结果,通过优化设计得出一种对称型柔顺铰链。然后,设计一种基于该对称型柔顺铰链三自由度微定位平台,并对设计的微定位平台进行理论分析和有限元分析,得出其输入输出位移关系,而且理论分析和仿真分析结果基本吻合。同时,采用基于理论分析模型的仿真分析修正方法对微定位平台的传递传递函数矩阵进行修正,提高微定位平台的定位精度。此外,分析了该微定位平台的应力变形,确定了其所选材料的力学性能指标符合设计要求。结果表明,该微定位平台能够符合大多数精密领域的需求,在精密定位领域具有一定的应用前景。

A 3-DOF micro-positioning stage based on symmetric compliant hinge is designed by analyzing a novel compliant hinge. Firstly, the relationship between the input force and output displacement for the novel compliant hinge is analyzed using the finite element method （FEM）. According to the analysis results, a symmetric compliant hinge can be determined by optimal design. Secondly, A 3-DOF micro-positioning stage based on such a symmetric compliant hinge is developed, and the displacement relationship for the designed micro-positioning stage between the input and output can be obtained by the theoretical and FEM analysis, and further the theoretical analysis is almost agreed with simulation. The transfer function matrix of the micro-positioning stage is corrected using the simulation correction method based on theoretical analysis model to improve the positioning accuracy. Additionally, the design requirement of mechanical properties of materials is determined by analyzing the stress and deformation of the micro-positioning stage. Analysis results show that such a micro-positioning stage is feasible.