多晶金刚石固结磨料研磨垫精研石英玻璃的性能探索

Lapping performance on quartz glass of fixed abrasive pad embedded with multi-grain diamond grits

通过粘结剂将单晶金刚石制成粒径更大的多晶金刚石。采用SEM观察了多晶金刚石的微观形貌,分别制备了单晶和多晶金刚石固结磨料研磨垫,比较了单晶与多晶金刚石固结磨料研磨垫的研磨性能。结果表明:单晶金刚石固结磨料垫与多晶金刚石固结磨料垫精研石英玻璃的表面粗糙度相似;但多晶金刚石固结磨料垫的材料去除率更高且稳定;多晶金刚石在研磨过程中的微破碎,确保了其自修整过程的实现。另外,多晶金刚石研结磨料垫研磨的石英玻璃亚表面损伤层深度小,约为原始单晶金刚石粒径的1/2。

Multi-grain diamond grits were prepared through binding micro diamond particles with binder. SEM （Scanning Electron Microscope） was adopted to observe their microscopic morphology, and both multi-grain diamond grits and single diamond grits are made into fixed abrasive pads （FAP）. The lapping performance of FAP embedded with multi-grain diamond particles was compared with that with single diamond particles. Results show that the average surface roughness lapped with multi-grain diamond FAP is almost the same as that lapped with single diamond FAP, and the multi-grain diamond FAP shows a higher and more stable material removal rate. The micro-fracture of multi-grain diamond grit in lapping process guarantees the realization of self-conditioning of hydrophilic FAP. In addition, the subsurface damage depth of quartz glass lapped with multi-grain diamond FAP is much smaller, which is only about 1/2 of that with single diamond FAP.