摘要
VO_2是一种受人关注的功能材料,在68℃附近发生从高温金属相到低温半导体相的突变,且相变可逆。由于相变前后其电、磁、光性能有较大的变化,使得它在智能玻璃、存储介质和非制冷红外成像等方面有着广泛的应用。由于制备高纯度VO_2薄膜较为困难,因此人们对VO_2薄膜的制备进行了大量的研究工作。文章综述了VO_2薄膜的各种物理制备方法与化学制备方法以及他们的最新研究进展,根据对不同制备方法优缺点的分析及探讨,对二氧化钒薄膜制备方法的研究方向进行了展望。
Vanadium dioxide（VO_2） is one of the most interesting functional material, and undergoes a reversible transition from semiconductor to metallic state at approximately 68 ℃. The considerable changes in its electrical, magnetic and light characteristics are associated with the phase transition, so that it can be widely used in smart window, optical storage media devices, uncooled IR detectors, etc. Since it is difficult to get pure VO_2, much work has been done to investigate the fabrication of the VO_2 thin film. The paper summarizes the recent progress of the physical and chemical preparation methods of VO_2 thin film. Also, the advantages and the disadvantages of each method were discussed. The investigative directions on preparation method of VO_2 thin film are viewed according to the analysis of different preparation methods.
出处
《广东化工》
CAS
2016年第20期104-104,111,共2页
Guangdong Chemical Industry
基金
国家大学生创新创业训练计划项目
项目编号:201610220035
关键词
VO2
薄膜制备
退火
相变
VO2
film preparation
annealing
phase transition
