Sentaurus TCAD仿真课程的研究和实践

Study on Creating Excellent Class with Students of Material Engineering

Sentaurus TCAD是电子产业的重要工具,它可以用来模拟集成器件的工艺制程,器件物理特性和互连线特性等。文章对Sentaurus TCAD仿真课程的教学内容、教学方法、实验教学等方面提出了探索性的改革思路和实践情况,以期教学能紧跟学科发展方向,调动学生的学习热性,培养创新能力,提高专业素养,为国家的研究型和应用技术型人才培养目标做出积极贡献。

Sentaurus TCAD is an important tool for the electronics industry, which can be used to simulate the process of integrated devices, physical characteristics of the device and interconnect characteristics of the device and interconnect characteristics. The paper puts forward tentative reform ideas and practice situation from the ＂Sentaurus TCAD Simulation＂ teaching contents, teaching methods, experimental teaching and so on, hoping to make teaching closely follow the direction of discipline development, to mobilize students＇ learning enthusiasm, to cultivate students＇ innovative ability, and to improve their professional accomplishment, so as to make a positive contribution to the goal of cultivating research and application oriented talents.