基于直线电机驱动的芯片检测定位控制系统研究

The Research of Positioning System and Control System for Check Chips Based on Linear Motor

芯片在封装过程中可能存在金线断裂,封装开裂等内部损伤,通常需要进行内部探伤来检测其是否合格。由于芯片内部元件以及线路极其精密,因此对检测系统的驱动定位系统也要求具有极高的精度。文章基于U型直线电机高精度的特点,设计了由U型直线电机驱动的超声波芯片检测定位控制系统,通过对由U型直线电机驱动的工作台硬件以及软件的设计,达到了芯片检测的要求。

During the process of encapsulation, there may be internal damage, such as broken gold wire and package cracking, etc.,and it is usually necessary to carry out internal testing to check whether it is qualified. As the internal components of the chip and its precision, the detection system of the drive positioning system also requires a very high accuracy. Based on the characteristics of high precision of U type linear motor, this paper designs an ultrasonic chip detecting and positioning control system driven by U type linear motor. The hardware and software of the table driven by U type linear motor are designed to meet the requirements of chip testing.