反应温度对卤素刻蚀法制备碳化物衍生碳涂层的影响

Effect of reaction temperature on carbide derived carbon coatings prepared via halogenation method

近些年来,碳化物衍生碳以其独特的性能被广泛应用在气体存储、超级电容器、催化剂载体和摩擦涂层等方面.卤化法以成本低、制备工艺简单等特点成为制备衍生碳涂层的热点.本文以SiC陶瓷基体为前驱体,通过高温氯化处理工艺在SiC表面制备碳化物衍生碳涂层,并研究了反应温度与其摩擦学性能之间的关系.研究结果表明:在1 175℃下保温2 h所制备的SiC-CDC涂层表面光滑平整、硬度最高、且与基体的结合强度最好.此时SiC-CDC涂层的干摩擦系数最小,耐磨性最强,具有良好的摩擦学性能.氯气刻蚀反应制备SiC-CDC涂层可为工业上应用衍生碳涂层提供理论和技术支持.

In recent years,carbide derived carbon has been widely used in gas storage,super capacitor,catalyst carrier and friction coating due to their unique performance.The halogenation method for derived carbon coating with the features of low- cost and simple process has caused wide public concern.In the present paper,a silicon carbide ceramic substrate was taken as a precursor,a carbide-derived carbon（CDC） coating was prepared on a SiC surface through high temperature chlorination treatment,and relationship between reaction temperature and tribological performance was investigated.The results showed that,kept the temperature at 1 175℃ for 2 h,the SiC- CDC possesses smoother and denser surface,higher hardness,higher adhesion with the substrate,minimum dry friction coefficient,well abrasion resistance and tribological performance.The authors believe that the low- cost technology of SiC-CDC prepared through halogenation could supply a theoretical and technical support for the industrial applications of carbide- derived carbon coatings.