摘要
采用水热法合成了氧化铟(In_2O_3)微球结构。利用X射线衍射仪(XRD)和扫描电子显微镜(SEM)表征分析In_2O_3样品的晶相、元素种类和微观形貌。测试结果表明:合成的In_2O_3为空心的微球结构,且其平均直径约1μm。同时,制备了基于In_2O_3的气体传感器,并对异丙醇的气敏特性进行研究。实验结果表明:在最佳工作温度(300℃)条件下,该气体传感器对体积分数为10-4异丙醇气体的响应可达10.3,响应时间和恢复时间分别为2 s和7 s,且最低检测极限为5×10-7。最后,讨论了In_2O_3材料对异丙醇的气敏机理。
Indium oxide(In_2O_3)microsphere structures were synthesized by the hydrothermal method.The X-ray diffraction(XRD)and scanning electron microscope(SEM)were introduced to investigate and analyze the crystal phase,element composition and microtopography of the asprepared In_2O_3 samples.The results show that the mean diameter of the synthesized In_2O_3 hollow microsphere structures is about 1μm.Meanwhile,the In_2O_3-based gas sensor was prepared,and the gas sensing experiments were conducted on the In_2O_3 hollow microsphere for isopropanol detection.The measured results exhibit that the response of the gas sensor to isopropanol can reach to 10.3 with the volume fraction of 10-4 under the optimum operating temperature(300 ℃).Moreover,the response time and recovery time are 2 s and 7 s,and the minimal detection limit is as low as 5×10-7.Finally,the gas sensing mechanism of In_2O_3 materials to isopropanol was discussed.
出处
《微纳电子技术》
北大核心
2016年第11期714-718,共5页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(51205274)
山西省人才专项资助项目(2016[36])
山西省自然基金资助项目(2016[39])
山西省高校科技创新研究项目(2016[37])
山西省归国留学择优资助项目([2014]95)
山西省归国留学基金资助项目(2013-035)
山西省科技重大专项资助项目(20121101004)
山西省高等学校特色重点学科建设项目(晋教财[2012]45号)
关键词
水热法
In2O3微球
气体传感器
气敏特性
异丙醇
hydrothermal method
indium oxide microsphere
gas sensor
gas sensing property
isopropanol