MPCVD法制备纳米金刚石薄膜的研究及应用进展

PROGRESS AND APPLICATIONS OF NANOCRYSTALLINE DIAMOND FILM BY MPCVD

通过介绍不同气源和相关工艺参数(温度、功率等)对MPCVD法制备纳米金刚石的影响,并对部分学者的研究成果进行简述。然后简要概括了MPCVD纳米金刚石在各种窗口、宽禁带半导体功率器件以及生物医学中的应用,最后对纳米金刚石未来的发展做出展望。

This paper is mainly about the different gas source and related process parameters（like temperature,power,etc.）of MPCVD preparing nano-diamond,and gives a brief description of results of some scholars＇ researches. Then,this paper summarizes the applications of MPCVD nano-diamond in various windows,wide band gap semiconductor power devices and biomedical applications. Finally,we prospect the future development of nano-diamond.