摘要
为实现IC芯片图像的精确配准,提出一种Fourier-Mellin变换和曲面拟合法结合的图像亚像素配准算法。算法首先采用Fourier-Mellin变换计算出待配准IC芯片图像的旋转角和平移量的整像素峰值位置,然后对峰值区域进行基于最小二乘的曲面拟合,通过取极值点获得亚像素级的精确峰值位置。另外,Fourier-Mellin变换由于旋转的频谱混叠和坐标变换中的重采样插值会产生误差,新算法采用加窗和滤波的方法加以改进。实验结果表明,所提算法实现了IC芯片图像的亚像素级配准,具有较好的精度和鲁棒性。
To achieve IC chip image accurate registration,a new image sub-pixel registration algorithm which combines Fourier-Mellin transform and surface fitting method is proposed.The new algorithm first calculates the peak position of rotation angle and translation of the matched IC chip image via using Fourier-Mellin transform.Then,the peak area is fitted by using least squares method,and the accurate peak position which is a sub-pixel value is obtained through calculate extreme points.In addition,spectrum aliasing and resampling interpolation during coordinate transformation will bring errors by applying Fourier-Mellin transform.The proposed algorithm resolves this problem by adding window function and filtering.Simulation results show that the proposed algorithm accomplished IC chip image sub-pixel registration with optimal robust and accuracy.
作者
许少娟
王演
王鲁云
张晶泊
XU Shaojuan WANG Yan WANG Luyun ZHANG Jingbo(City Institute, Dalian University of Technology, Dalian 116600,China School of Information Science and Technology, Dalian Maritime University, Dalian 116026 ,China)
出处
《青岛科技大学学报(自然科学版)》
CAS
2016年第5期573-579,共7页
Journal of Qingdao University of Science and Technology:Natural Science Edition
基金
国家自然科学基金项目(61501078)