Ni含量对CrNiTiN涂层微观结构及摩擦磨损性能的影响

Effect of Ni-Content on Microstructures and Tribological Behavior of CrNiTiN Coatings

采用闭合场非平衡磁控溅射离子镀技术在H13钢和单晶Si(110)表面沉积CrNiTiN四元硬质涂层。通过改变Ni靶电流大小来改变CrNiTiN涂层中Ni的含量。利用扫描电镜、X射线衍射能谱、X射线光电子谱、摩擦磨损实验、纳米压痕测试等技术研究Ni含量对涂层成分、结构及摩擦磨损性能的影响。结果表明:CrNiTiN涂层结构致密,以柱状晶方式生长;Ni在涂层中以单质及化合物形式存在;随着Ni的加入及其含量的增加,涂层平均晶粒尺寸从29减小到14 nm,涂层择优取向由(220)面转向(200)面,硬度及弹性模量先增加后减小,平均摩擦系数及磨损率先减小后增加;当Ni含量为4.21%(原子比)时,硬度最高为22.4 GPa,平均摩擦系数最小为0.52,磨损率最小为1.4×10-15m3/Nm。

The CrNiTiN quaternary hard coatings were deposited on substrates of H13 steel and Si （110） by closed-field unbalanced magnetron sputtering ion plating. The influence of the Ni-content（ or the Ni-target current） on the microstructures sive spectroscopy, X-ra and tribological behavior was investigated with scanning electron microscopy, energy disper- ,y diffraction, X-ray photoelectron spectroscopy and conventional mechanical probes. The re- suhs show that the Ni-content significantly affects the microstructures and mechanical properties of the dense and compact CrNiTiN coatings. To be specific, as the Ni-content increased, the average size of the columnar grains de- creased from 29 nm to 14 nm with the preferential growth orientation changing from （220） into （200） ;the hardness and elastic modulus changed varied in a decrease-increase in an increase-decrease mode, in contrast, the manner. Grown at 4. 21% （at.） ,the coating average friction coefficient and wear-rate has the highest hardness of 22. 4 GPa,with average friction coefficient of 0. 52 and average wear-rate of 1.4 × 10 ^-15m3/Nm.