离子注入聚醚砜的射程分布和能量淀积

The range distribution and energy deposition distribution of 15 keV N^+ or Ar^+ implantation in polyether sulfone film

计算了 1 5 ke V N+和 Ar+注入聚醚砜薄膜的射程分布和能量淀积分布 ,利用计算的结果说明了离子注入聚醚砜膜后 ,薄膜表面电导率增加 (增加 5个数量级 )和光吸收率增加 (最大吸收率从44%增加到 82 .5 % )

It is analyzed that range distribution and energy deposition distribution of 15 keV nitroger or argon ions implantation in polyether sulfone film.The increase of surface conductivity(from 2.54×10 -14 /Ω increase to 2.96×10 -9 /Ω) and optical absorptivity(maximum optical absorptivity from 44% increase to 82.5%) after implanted can be explained by using this theory.