高面形精度标准镜自重变形的补偿技术

Compensation Technique for Gravity Deformation of High Precision Standard Mirror

为了提高光学检测精度,完善标准镜装配工艺,针对采用胶粘法装配的镜片提出了两种补偿镜片自重变形的方法,即通过改变胶层位置补偿镜片自重变形的方法和通过施加作用力改变镜框形变量补偿镜片自重变形的方法。通过理论计算、建模仿真与光学检测的手段验证不同工况下自重变形对于面形精度的影响。给出了镜片面形与胶层位置、作用力的对应关系,镜片经过补偿可以达到很高的面形精度,明显优于普通胶粘法,实验对象在补偿前的面形精度为4.511nm,补偿后面形精度达到2.134nm,保证了标准镜的高面形精度。

In order to improve the optical detection accuracy, to perfect the standard mirror assembly process, two methods for compensating the lens gravity deformation were put forward in view of the fixed lens with adhesive method. One of them was by changing the adhesive location, the other was by changing the shape variable of frame. The effects of gravity deformation on surface shape accuracy were verified with the theoretical calculation, simulation and optical detection methods. The relationships between the surface shape and the adhesive location, and between the surface shape and the force were put out. The surface shape could achieve a high precision through the combination of the two methods, it is better than the older adhesive methods. The surface shape accuracy is 4.511nm in front of the compensation, and it is 2.134nm behind the compensation. The high standard of mirror surface shape accuracy is guaranteed.