摘要
铜铟镓硒(Cu(In_xGa_(1–x))Se_2,CIGS)薄膜是目前备受关注的一种太阳能电池材料,磁控溅射是其重要的制备方法。本文从溅射工艺(衬底温度、溅射功率、工作气压)和组成调控(硒含量、Ga梯度)两个方面简述了关于磁控溅射CIGS薄膜的研究进展(尤其是对其光伏性能的调控),提出了提高CIGS薄膜电池光电转换效率的建议及研究方向。
As a sort of solar cell material, copper indium gallium diselenide （Cu（InxGa1-x）Se2, CIGS） thin films attached much concerns, and the magnetron sputtering is an important method for its preparation. In this article, recent progresses on CIGS thin films using magnetron sputtering both at home and abroad are reviewed, especially the regulation on its photovoltaic properties. It includes optimization sputtering technology, such as substrate temperature, sputtering power, working pressure, and composition regulation, such as selenium content and gallium gradients. Suggestions and research directions to improve the photoelectric conversion efficiency of CIGS thin film cells are presented.
出处
《电子元件与材料》
CAS
CSCD
2016年第11期49-53,共5页
Electronic Components And Materials
基金
国家自然科学基金资助(No.51372283)
关键词
铜铟镓硒
太阳能电池
综述
薄膜
磁控溅射
工艺优化
Cu（InxGa1-x）Se2
solar cell
review
thin film
magnetron sputtering
process optimization
