金刚石膜的六十项性状指标和百项相关成膜因素

60 character indices and 100 related film formation factors of diamond films

为了表征金刚石膜性能的稳定性,本文给出了六十项性状指标和百项相关成膜因素、因果值A、制膜效果作为比较平台。发现沉积腔中气流有喘息、电弧转速有进动。磨耗比E值随测量过程而变。影响膜质的温度有22种。该平台为比较金刚石膜的稳定性找到了依据,不仅方便了技术交流、推动了膜品相的提高和制备技术的进步、还为标准的建立提供了方便和技术储备。

In order to show the stability of diamond films , 60 character indices and 100 related film formation factors of diamond films, the causality value A and the effect of film formation were listed in this paper as comparison platform. It was found that the airflow in the deposition chamber was wheezed and the rotation speed of arc had procession. The abrasion ratio E was changed according to the measurement process. There were 22 kinds of temperature that influence the quality of diamond films. The establish of character platform facilitated the technological exchange among different groups, promoted the progress of diamond film preparation technique and quality improvement, provided convenience and technical reserve for the establishment of related standard.