工艺路线对TFT工厂能源消耗的影响

Influence of device structure and production technics on energy consumption in TFT factory

为了在TFT工厂的设计、建设及运营阶段采取有针对性的节能降耗措施,有效降低器件制备过程中的能耗,本文根据我院多年从事TFT生产线节能评估工作的经验数据,针对不同技术路线,选取具有代表性的TFT-LCD及AMOLED生产线,并对其能耗进行对比分析,以讨论不同技术路线对TFT-LCD及AMOLED显示器件生产能耗的影响。分析结果表明：阵列制备是最主要用能工序,其制备复杂程度可采用光罩次数（Mask）表征。随着光罩次数的增加,器件制造对电力、氮气、新鲜水等能源及耗能工质的需求呈急剧增长：采用10-13Mask技术的LTPS及AMOLED显示器件,其综合能耗达到a-Si及Oxide技术路线的约350%之多;在不同技术路线下,电力均为最主要的用能需求,其消耗量占总能耗的80%-87%。能耗的增加导致用能成本的大幅上升。在国家大力提倡绿色经济的环境下,建议各大厂商采取科学有效的能耗管控措施,以降低能源消耗及用能成本,实现产业的健康可持续发展。

In order to take proper energy saving measures in design,building and running of TFT factory and reduce energy consumption of the TFT device production effectively,this article takes the method of comparative analysis,by summarizing the energy consumption data of typical TFT-LCD and AMOLED production lines designed by CEEDI,analyzes how device structure and production technics impact the energy consumption in device production.The result shows that TFT array is the most important energy consuming process,and complexity of array process can be characterized by repeat number of the mask.As repeat number of mask process increases,consumption of electric,nitrogen and fresh water increase remarkably.Total energy consumption of LTPS and AMOLED device that adopt 10-13 mask technics can be up to 350% of those that adopt a-Si and Oxide technics.In all technic routes,electric is the most important energy that needed,which takes 80%-87%of total energy consumption.Increased energy consumption leads to increase in energy costs.Now the country vigorously promotes green economy,suggest TFT and AMOLED manufacturers take scientific energy control measures,not only to reduce energy consumption and cost,but also to achieve the healthy and sustainable development of TFT-LCD and AMOLED industry.