激光微孔加工技术及应用

Laser Micro-Holes Machining Technology and Its Application

随着高端、精密装备的飞速发展,人们对高质量、大深径比微孔的需求越来越紧迫。基于此,介绍了飞秒激光与水导激光两种加工微孔的技术,首先探讨了两种微孔加工技术的原理并且回顾了两种微孔加工技术的研究现状;然后着重讨论了激光工艺参数、打孔方式、加工环境(真空、气体、液体、化学环境)、激光与水束光纤耦合对于高质量微孔加工的影响;最后总结了两种微孔加工技术在航空航天领域的应用以及当前面临的问题。

With rapid development of high quality and sophisticated equipment, the demand of high quality, high depth/radius radio micro-holes is more and more urgent. Femtosecond laser and water-jet guided laser drilling technologies are introduced. Firstly, the principles of two kinds of micro-holes machining technologies are discussed and two kinds of micro-holes drilling technology research status are reviewed; Then, the effects of processing mode, laser process parameters, processing environment （vacuum, gas, liquid, chemical environment） and laser beam coupling with water on the micro-hole drilling quality are discussed; Finally, aerospace application of two kinds of micro-hole machining technologies and current problems which we face are summed up.