摘要文章通过对极紫外激光烧蚀理论进行阐述,浅谈了激光辅助放电等离子体烧蚀理论相对于激光产生等离子体(Laser Pro duce Plasma,LPP)和放电产生的离子体(Discharge Produce Plasma,DPP)的优势,同时对该理论和实验装置进行简要的概述,力求通过文章,使人们能够对该理论有更好的宏观认识。
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