接触式表面轮廓测量的非线性误差分析与补偿

Analysis and Compensation of the Nonlinear Error Based on Contact Surface Profil Measurement

测量触针随杠杆绕支点转动产生圆弧轨迹，其水平方向位移偏差会对大量程接触式表面轮廓测量形成误差。在改进传统测杆结构的基础上，建立了测量结果的非线性误差数学模型，推导出多项式拟合误差的补偿算法。提出了拟合标准球计算误差补偿参数的方法。通过对半径为79．5053mm的球冠测量，得到半径尺寸误差小于1μm，实验证明了取得了较好的补偿效果。

A circular path is produced by measuring stylus rotating with the lever axle, and the horizontal deviation affects the accuracy of surface profile measurements. Based on the improvement of traditional measuring rod, the mathematical model of non-linear measurement error and the compensation algorithm of polynomial fitting error are derived. The method of calculating error compensation parameters by fitting a standard ball is proposed. For a spherical cap of 79. 505 3 mm radius, experimental results shown that the size of the radius error is less than 1μm, the effect of the compensation is better.