热释电型激光能量计空间均匀性校准技术研究

Research on Spatial Uniformity Calibration of Pyroelectric Laser Energy Meter

热释电探测器由于其灵敏度高、响应速度快、体积小、损伤阈值高等特点,作为激光能量计的传感器在激光能量检测方面使用广泛。由于制作工艺的限制,热释电型激光能量计的热敏面灵敏度系数存在空间非均匀性问题,导致当激光照射到探测器不同位置时,激光能量测量结果不准确。针对这一问题,设计一种热释电型激光能量计空间均匀性校准方法,通过对热释电探头光路的控制,消除空间均匀性对测量结果的影响,并通过实例验证了方法的可行性。

For good features such as high sensitivity, fast response speed, small volume and high damage threshold, the pyroelectric detector as the sensor of the laser energy meter is widely used in laser energy detection. Limited by the manufacture process, the thermal surface sensitivity coefficients of the pyroelectric laser energy meter has spatial non-uniformity problem. When the laser irradiates the different positions of the detector, the results of the laser energy measurement is different. To solve this problem, a pyroelectric laser energy meter spatial uniformity calibration method is designed. Through controlling the light path of the pyroelectric detector, the influence on measured results from spatial uniformity is removed. And the feasibility of the method is verified by the experiments.