一种除去三氯氢硅中磷杂质的新方法

A New Method of Removing Phosphorus from Trichlorosilane

文章对比了目前国内外氯硅烷除磷的主要方式；描述了一种新型除磷络合剂的制备方法；研究了该络合剂对三氯氢硅中的磷杂质的吸附效果。实验结果表明，使用该络合剂除去三氯氢硅中的磷耗时短，约1～10分钟：除磷效果高，可达95％以上。

A preparation method of a new complexing agent for removing phosphorus is described and also the adsorption effect of phosphorus impurities in trichlorosilane is studied in this paper. The experimental results shows that the time of removing phosphorus from trichlorosilane is very short （about 1-10 minutes when the new complexing agent is used. The removal rate of phosphorus is over to 95 %.