AZO透明导电薄膜光电性能的研究进展

Research Development of Optical and Electrical Properties of AZO Transparent Conducting Thin Films

掺铝氧化锌(AZO)薄膜其原料来源广、经济无毒,且具有优越的光电性能,可以与传统铟锡氧化物(ITO)薄膜相媲美,是优良的透明导电材料。目前,关于各制备工艺参数对AZO薄膜的影响规律及其影响机理仍是研究热点。综述了透明导电AZO薄膜光学与电学性能的研究进展,讨论了各制备工艺条件对薄膜性能的影响,分析了AZO/metal/AZO多层膜的研究现状,并对AZO薄膜的研究方向给予了展望。

Al-doped ZnO（AZO）thin film is an excellent transparent conductive material due to its wide source of raw materials,economy,non-toxicity and superior photoelectric performance which can be compared with traditional ITO film.At present,the influence rule and their mechanism of technical parameters on AZO films are still research hotspot.In this paper,we reviewed the research development of optical and electrical properties of AZO films,discussed the influence of the preparation parameters on films′properties,analyzed the research status of AZO/metal/AZO multilayer films,and forecast the research direction of AZO films.