膜厚对SnO_2∶Sb薄膜红外光学性能的影响

Influence of Film Thickness on Infrared Optical Properties of SnO_2∶Sb Thin Film

采用溶胶-凝胶法在玻璃基底上制备了Sb掺杂SnO_2(SnO_2∶Sb)薄膜。研究了膜厚对SnO_2∶Sb薄膜红外光学性能的影响,利用X射线衍射仪、分光光度计、霍尔效应测试系统对薄膜样品进行表征和测试。结果表明:SnO_2∶Sb薄膜为四方金红石型结构;当膜厚为1220nm时,薄层电阻最小,为157Ω/□;在红外波段,透射率随膜厚的增加显著下降,当膜厚为890nm时,在波长2000nm处,透射率接近于0,膜厚为1220nm时,在波长1750nm处,透射率为0。

Antimony doped tin oxide （SnO2 ： Sb） thin films were deposited on glass substrates via sobgel tech- nique. The effect of film thickness on the infrared optical properties of SnO2 ： Sb thin films have been studied. The samples were characterized by X-ray diffraction, spectrophotometer and Hall effect measurement system. The results indicate that the films show tetragonal rutile structure. The sheet resistivity decrease with increase of the film thick- ness and the smallest measured value is 157 Ω/□for the 1220 nm thick film. The transmittance in infrared region re- markably decreases with increasing film thickness. At wavelength of 2000 nm for the 890 nm thick film and 1750 nm for the 1220 nm thick film, the transmittance is nearly 0.