管式炉扩散法制备20%效率的n型双面电池

n-Type Bifacial Solar Cells with 20% Efficiency Produced by Furnaces Diffusion

采用一种管式扩散炉工艺制备了平均效率为20%的n型双面晶硅太阳电池。制得的n型双面晶硅电池峰值正面效率为20.30%、背面效率为17.59%。硼、磷扩散工艺分别在硼、磷高温管式扩散炉中实现,POCl_3气氛的高温扩散工艺沉积PSG/SiO_x层,BBr3气氛的高温扩散工艺沉积BSG/SiO_x层。电化学电容-电压法测试显示正面硼发射极没有受到POCl_3高温扩散的影响。采用电致发光测试方法研究了该n型双面电池的边缘漏电情况。该n型双面电池工艺制作流程采用常规的产线设备,适合大规模生产。

A furnace-diffused n-type bifacial silicon solar cells with the average efficiency of 20%was presented. The n-type bifacial solar cells have peak efficiencies of 20. 30% on the front sides and17. 59% on the back sides. The diffusion processes of B and P was based on a high temperature step in an atmosphere,containing POCl_3 and BBr3. A PSG / Si Oxlayer stack was deposited in the diffusion furnace containing POCl_3 atmosphere,and a BSG / SiO_x layer stack was deposited in the diffusion furnace containing BBr3 atmosphere. The electrochemical capacitance voltage measurement shows the boron emitter is not affected by the POCl_3high-temperature diffusion process. The edge current leakage of the ntype bifacial solar cells was studied by electroluminescence test. The current production equipments are adopted in the n-type bifacial cells process,which are suitable for large scale industrial production.