期刊文献+

非共振型压电电机驱动的大行程精密定位旋转平台的建模和实验 被引量:8

Modeling and experiment of precision rotary positioner with large stroke driven by non-resonant piezoelectric motor
下载PDF
导出
摘要 针对目前光波导封装使用的精密定位平台行程小,结构与控制系统复杂的问题,提出了非共振型压电电机驱动的大行程精密旋转定位平台。该平台通过压电电机的连续作动和步进作动两种工作模式来满足大行程和高精度要求。首先对该精密旋转定位平台进行动力学建模,确定了系统运动方程。然后,分析其作动机理,研究影响旋转平台转速的不同因素。最后,实验研究该精密旋转定位平台的速度、步距、分辨率与负载特性,确定平台连续作动与步进作动的驱动方式。实验结果表明,在直流偏置为60V,峰峰电压为120V,频率为180 Hz的正弦波电压激励下,该精密旋转定位平台最大转速可达47 963.2μrad/s,分辨率和最大负载分别为3μrad和60g。与现有的大行程精密定位旋转平台相比,设计的平台具有行程大,精度高,结构简单,稳定可控,且装配调试方便,易于批量化生产等优势。 A precision rotary positioner with a large stroke driven by the non-resonant piezoelectric motor was proposed to solve the problem of short stoke,complicated structure and control of the precision positioner in optical waveguide packaging.The precision rotary positioner could meet the needs of large stroke and high precision by two driving modes of continuous actuating and stepping actuating.Firstly,the dynamic model of the rotary positioner was established and the kinematicsformula of system was presented.Then,the principle of movement was analyzed and the impact factors of rotate speed were researched.Finally,the characters of rotate speed,step displacement,resolution and load were tested,and driving modes of continuous actuating and stepping actuating were discussed.The experimental results indicate that the top speed of precision rotary positioner reaches about 47 963.2μrad/s at the driving sinusoidal voltage in a peak-peak value of 120 V,an offset of 60 V and a frequency of 180 Hz.Moreover,the rotary resolution of precision rotary positioner is about 3 μrad and the maximum load is 60 g.This precision rotary positioner has characteristics of large stroke,high precision,simple structure,stable controllability and fast response.As compared with the existing precision rotary positioner,the new one presented in the paper has more larger stroke,higher precision,simpler structure and is more convenient to be assembled,adjusted,and produced in batch.
作者 黄卫清 陶杰 孙梦馨 王寅 卢倩 HUANG Wei-qing TAO Jie SUN Meng-xin WANG Yin LU Qian(State Key Laboratory of Mechanics and Control of Mechanical Structure, Nanj ing University of Aeronautics and Astronautics, Nanj ing 210016, China Center for Precision Measurement Technologies and Instruments, Huaqiao University, Xiamen 361021, China)
出处 《光学精密工程》 EI CAS CSCD 北大核心 2016年第11期2712-2720,共9页 Optics and Precision Engineering
基金 国家自然科学基金资助项目(No.51375224) 国家自然科学基金重大研究计划资助项目(No.91223201) 国家自然科学基金青年基金资助项目(No.51405420) 江苏省自然科学基金青年基金资助项目(No.BK20140474) 江苏高校优势学科建设工程资助项目
关键词 大行程旋转平台 非共振压电电机 精密定位 光波导封装 rotary positioner with large stroke non-resonant piezoelectric motor precision positioning waveguide packging
  • 相关文献

参考文献5

二级参考文献68

  • 1刘建芳,杨志刚,范尊强,程光明.压电直线精密驱动器研究[J].光学精密工程,2005,13(1):65-72. 被引量:21
  • 2马立,荣伟彬,孙立宁.三维纳米级微动工作台的设计与分析[J].光学精密工程,2006,14(6):1017-1024. 被引量:18
  • 3赵宏伟,吴博达,曹殿波,华顺明,程光明,杨志刚,曲兴田.直角柔性铰链的力学特性[J].纳米技术与精密工程,2007,5(2):143-147. 被引量:20
  • 4杨凯,张德林,辜承林.压电驱动器研究与应用中的若干新进展[J].微电机,2007,40(6):83-87. 被引量:13
  • 5TADIGADAPA S. Piezoelectric microelectromechanical systems-hallenges and opportunities[J]. Procedia Engineering, 2010, 5:468-471.
  • 6MA H K, HUANG S H, WANG J S, et al.. Experimental study of a novel piezoelectric proton exchange membrane fuel cell with nozzle and diffuser[J]. Journal of Power Sources, 2010, 195 (5) : 1393-1400.
  • 7SHARP S, PAINE J N, BLOTTER J D. Design of a linear ultrasonic piezoelectric motor [J]. Journal of Intelligent Material Systems and Structures,2010,21 (10):961-973.
  • 8GAO W, SATO S J, ARAI Y. A linear-rotary stage for precision positioning [J]. Precision Engineering, 2010,34(2): 301-306.
  • 9PILLER M, HURK Z. Hybrid charge control for stick-slip piezoelectric actuators [J]. Mechatronics, 2011, 21(1): 100-108.
  • 10YANG C F, JENG S L, CHENG W H. Motion behavior of triangular waveform excitation input in an operating impact drive mechanism [J]. Sensors and Actuators A, 2011, 116(1): 66-77.

共引文献34

同被引文献36

引证文献8

二级引证文献26

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部