摘要
甲醛是潜在致癌物和重要的环境污染物。电阻型半导体甲醛传感器因灵敏度高、工艺简单、操作方便、体积小而成为研究热点。从电阻型半导体甲醛传感器的气敏材料和器件结构两个方面展开分析,研究了国内外有代表性的最新研究成果,并展望了未来的发展方向。
Formaldehyde is a potential carcinogen and an important environmental pollutant. The resistor-type semiconductor formaldehyde sensors have become a hot research topic due to high sensitivity, simple process, easy operation and small size. The up-to-date research works of the resistor-type semiconductor formaldehyde sensors are analyzed,focused on gas sensitive materials and device structure, both at home and abroad. Furthermore, the future development trends of the resistor-type semiconductor formaldehyde sensors are prospected.
出处
《传感器与微系统》
CSCD
2016年第12期1-5,10,共6页
Transducer and Microsystem Technologies
关键词
甲醛
传感器
灵敏度
formaldehyde
sensor
sensitivity
