实现工艺误差校准的脉冲宽度调制温度传感器

Pulse width modulated temperature sensor with process error calibration circuit

设计了一种脉冲宽度调制结构的温度传感器。采用了环形延迟阵列替代传统冗长的延迟阵列。针对该类型温度传感器精度较低的问题,分析了传感器工艺误差产生原理,在此基础上,设计误差校准电路。校准电路功能采用现场可编程门阵列（FPGA）验证,结果表明符合设计要求,可实现校准功能。采用SMIC 0.18 CMOS工艺对温度传感器电路进行仿真,结果表明：温度传感器温度范围为-20～60℃时,分辨率为1℃/LSB。

A kind of pulse width modulation temperature sensor is designed. Instead of conventional long delay array,a cyclic delay array is used. To improve precision of temperature sensor,a process error calibration is proposed,on the basis of analyzing the generation principle of process error. The error calibration circuit is implemented by FPGA. The verification results show that the calibration function can be realized and the results can meet the requirements. The circuit is fabricated by SMIC 0. 18 CMOS standard process,the simulation results indicate that the temperature senor achieves a resolution of 1℃/LSB at range of-20 ～ 60℃.