摘要
采用磁控溅射技术在铝合金ZL109表面沉积了Ti N镀层。通过XRD、SEM、MH-6显微硬度计研究不同氮气流量对镀层界面形貌、析出相及显微硬度的影响。结果表明:在基本工艺参数一致的情况下,随着氮气流量的增大,镀层的致密度越来越好,厚度增加;XRD结果表明镀层相结构主要为Ti N,有明显的择优取向;Ti N镀层的显微硬度随着氮气流量的增加而升高。
TiN coating was prepared on the surface of ZL109 alloy by magnetron sputtering process. The effect of nitrogen flow rate on interface morphology,precipitation phase and microhardness were studied by XRD,SEM and MH-6 microhardness tester. The results showed that,with the increasing of nitrogen flow rate,the density of coating was getting better and better,and the thickness of coating has also increased. XRD indicateed that phase structure of coating was TiN and it had obvious preferred orientation. The microhardness of TiN coating has increased with the increasing of nitrogen flow rate.
出处
《佳木斯大学学报（自然科学版）》
CAS
2016年第6期958-960,共3页
Journal of Jiamusi University：Natural Science Edition
基金
安徽省质量工程项目(2014jxtd098)
安徽机电职业技术学院院级自然科学项目(2015yjzr04)
关键词
氮气流量
TIN镀层
界面形貌
显微硬度
nitrogen flow rate
TiN coating
interface morphology
microhardness
