MPEE-CVD法可控多层石墨烯制备

Synthesis of controllable multi-layer graphene by MPEE-CVD

石墨烯是有着诸多优异的物理和化学性能的蜂窝状二维晶体材料,在多个领域展现出令人振奋的应用前景。然而,可控制备高质量、大面积石墨烯仍然是一个难题。通过使用市售微波炉改造成的微波等离子体刻蚀辅助化学气相沉积系统(MPEE-CVD),研究等离子体刻蚀对石墨烯生长机制的影响,优化生长条件,成功实现了可控多层石墨烯的制备,为进一步研究多层石墨烯的应用提供了有效和可靠的可控制备方法。

Graphene is a promising advanced 2 dimensions material for broad applications in many fields.Howev-er,synthesis of high quality,multi-layer graphene is still challenging.In this paper,by using commercial mi-crowave,we demonstrate a method of microwave plasma enhanced chemical vapor deposition （MPEE-CVD）to synthesis multi-layer graphene.