高精度温控退火炉的研制与控温程序的调试

Preparation of a Temperature-controlled Annealing Furnace with High Precision and Debugging of the Temperature Control Program

晶体退火是一个重要的工艺过程 ,不同温度、不同气氛下的退火处理是晶体缺陷研究的重要手段。本文从退火炉的整体构造、管端配件的设计、控温电路和温度程序控制调节器的使用三个方面介绍了由同济大学玻耳固体物理研究所自行研制的小型高精度温控退火炉装置 。

Synthetic crystals are the basic electronic and photonic materials.In new century the central role of single crystals is and will almost certainly continue to be in global IT.Annealing is very important during the course of the crystal growth technology.Through the different annealing treatment we can obtain some important information about the crystal defects. A minitype temperature controlled annealing furnace with high precision is introduced,which is empoldered by the Phol Institute of Solid State Physics of Tongji University in Shanghai.This paper describes the furnace in three aspects,which are the conformation of the annealing stove,the design of the fittings at the quartzose pipe's two ends and the operation of the programmable temperature controller.In allusion to the representative annealing process of the crystal, the selection of the PID parameters and the debugging of the temperature control program are defined particularly.