工艺参数对铝合金微波模块YAG激光密封焊接质量的影响

Effect of Technological Parameters on YAG Laser Seal Welding Quality of Aluminum Alloy Microwave Module

微波模块作为雷达的核心模块,其内部使用了大量的半导体裸芯片,模块的密封是基本要求。激光密封焊接作为一种新兴的密封技术,成为保护微波混合集成电路的有效手段。在激光密封过程中,选用的铝合金材质、结构、表面处理、YAG激光设备的工作参数如脉冲波形、频率、峰值功率、离焦量、焊接速度对铝合金激光密封质量有着十分重要的影响。通过对以上因素的控制,模块密封性可以达到国家军标密封性的最高要求,即壳体漏率小于1×10^(-9)Pa·m^3/s。

The microwave module is the core module of radar and the module has a large number of semiconductor bare chips. It is basic requirement for sealing the microwave module. Laser seal welding is a new sealing technology which is an effective mean to protect microwave integrated circuit. In the procedure of laser sealing, the aluminum alloy material,structure, surface preparation and working parameters of YAG laser equipment such as pulse waveform,frequency, peak power, defocusing distance, welding speed has important influence on aluminum alloy sealing quality. The highest sealing requirement of the military standard can be gotten through the control of the above factors, which means that the leakage rate is less than ×10-9 Pa·m3/s.