CVD金刚石膜在LED散热系统的研究现状及展望

Research Progress and Prospect of CVD Diamond Films in LED Cooling System

金刚石由于其具有高的热导率，在自然界被认为是最好的热导材料，因此用化学气相沉积（CVD）法制备的金刚石膜是微电子器件的理想散热材料。本文主要阐述了四种不同的以金刚石膜为基础的散热系统在LED领域的应用现状及发展趋势，并对未来的以CVD金刚石膜为基础的LED散热片进行了前景预测。

Because of its high thermal conductivity, Diamond is considered to be the best thermal conductivity material in nature. Therefore, the chemical vapor deposition （CVD） diamond film is ideal heat sink material for microelectronic device. This paper describes four different diamond film - based cooling system application status and development trends in the field of LED, and the future to CVD diamond film -based LED heatsink was forecast.