大口径SiC非球面范成精密磨削方法及其工艺

Precision Generated Grinding Method and Its Technology of Large Diameter SiC Aspheric Surface

为了提高大口径轴对称Si C非球面磨削的精度和效率,提出了一种基于法线跟踪的非球面范成摆动精密磨削方法,设计了运动控制模型,在磨削过程中,使砂轮主轴旋转中心线与非球面母线上磨削点法线始终保持重合。在此基础上,进一步设计了可以对非球面母线上磨削点进行实时检测的装置,建立了实现砂轮磨损自动补偿的数学模型和相关磨削工艺。研究结果表明:该方法可以避免磨削运动轨迹原理误差,运动机构简单,运动精度得到保证;应用砂轮端面进行磨削,提高了磨削比和磨削效率。

In order to improve the grinding accuracy and efficiency of large diameter aspheric surface, a generated grinding method for aspheric surface based on the normal track is proposed, and a motion control model is designed. In grinding process, the rotation centerline of grinding wheel spindle always coincides with normal line of grinding point on aspheric surface. A detecting device is designed for tracking shaping precision in real-time, and a mathematical model and a related grinding process for automatic compensation of grinding wheel wear are established. Results show that the proposed method can be used to avoid the principle error of grinding motion trajectory, make the motion mechanism simple, and ensure the motion accuracy; grinding ratio and grinding efficiency are increased by using the end face of the grinding wheel for aspheric surface grinding.