LPCVD法制备TiO_2纳米薄膜的物效及能效研究

Study on Material and Energy Efficiency of Nano-TiO_2 Film Prepared by LPCVD

针对LPCVD法制备TiO_2纳米薄膜过程中物效和能效低的特点,主要考虑沉积压力、沉积温度和物料的流量3个因素。研究了不同的工艺参数在沉积一定时间后的物效、能效计算和分析方法。结果显示,在一定的范围内,压力的提高能够有效提高物效和能效;随着温度的升高,物效提高而能效先降低后提高;物料的流量越大物效越低,而能效先升高后降低。当工艺参数400Pa,723K,2.67×10^(-6)m^3/s时物效最高(6.395%);当工艺参数为600Pa,723K,3.33×10^(-6)m^3/s时能效达到最高(0.201 4%)。

Aiming at the low utilization rate of both material and energy in TiO2 nano-film prepared by LPCVD, the deposition pressure and temperature and flow of reactants were considered; and as for various technological parameters, both material and energy efficiency at a particular deposition time were discussed to show that, in a certain range, both material and energy efficiency can be effectively improved with the increase of pressure ; and with the rise of temperature, the material efficiency can be promoted and the energy efficiency experiences a drop at first and then a growth ; and higher material flow can bring about a lower material efficiency while the energy efficiency increases at first and then decreased. When the technological parameter stays at 400Pa, 723K and 2.67 ×10^-6m^3//s, the material efficiency can reach 6. 395% at most, but for the parameters of 600Pa, 723K, 3.33×10^-6m^3//s, the energy efficiency is 0. 2014% at most.