碳化硅微粉在多线切割中的应用

The Application of Silicon Carbide Powder in Multi-wire Saw

对多线切割过程,碳化硅微粉的性质和标准进行了介绍,描述了碳化硅微粉在多线切割过程中的作用,讨论了砂浆的配制方法及注意事项;由于砂浆的成本在整个切割过程中占据了相当大的一部分,因此如何降低砂浆的成本是一个热点问题;根据硅片生产厂家的实践发现,使用一定比例的回收碳化硅微粉能够降低生产成本,同时对硅片表面质量影响较小,并且有利于环境保护,因此具有可行性。

A necessary material in multi-wire sawing method is SiC powder. A brief introduction of the process of multi-wire sawing, property and standard of SiC is made. The effect of SiC powder in the multi-wire sawing is described. A discussion of the preparation and matters needing attention about SiC is described in this paper. Because the cost of SiC powder takes a great part in the whole cutting process, how to reduce the cost the slurry is a hot point. According to the experiments, it is found that the use of recycling SiC has a slight influence on the quality of Si wafer, however, it could decrease the producing cost and is environment-friendly. Therefore, it is possible to use recycling SiC to replace part of new SiC powder.