一种单腔式微型隔膜泵的结构设计及流量分析

The structural design and flow analysis of a single cavity micro diaphragm pump

针对市场的实际需求,设计研制了一台流量为200mL/min的单腔式微型隔膜泵,文章介绍了流量设计计算的基本原理和泵的结构组成,利用搭建的微型泵流量测试平台进行了测试。结果表明不同电压下隔膜泵的出气速率随电压成线性关系,所设计的微型隔膜泵流量控制稳定,可靠性较高。

In view of the actual demand of the market, we design and develop a single cavity miniature diaphragm pump which has a 200mL/min flow rate. This article introduce the fundamental of the flow design calculation and the structure of the pump.We tested the pump with a home-made gas flow measurement platform. The results show a linger relationship between the diaphragm pump＇s outgassing rate and voltage when it works under different voltage. And, the pump has a stabilized flux control and a high reliability.