含氢硅油表面改性SiO_2疏水增透膜的制备及其表征

Preparation and Characterization of Hydrogen Silicone Oil Surface Modification of SiO_2 Antireflective Coating

采用含氢硅油(poly(methylhydrogen)siloxane,PMHS)对溶胶-凝胶法制备的SiO_2增透膜进行表面修饰,以提高其疏水性能。采用含氢量分别为0.2%、1.0%和1.5%的PMHS,研究改性剂溶液中PMHS含量对增透膜性质的影响。结果表明:经含氢量为0.2%的PMHS改性后的SiO_2增透膜仍能保持99.50%以上的透过率;而经含氢量为1.0%和1.5%的PMHS改性的增透膜的透过率下降显著。0.2%PMHS改性的增透膜的显微结构与未改性的相似,而1.5%PMHS改性的增透膜孔隙数目明显减少。经含氢量为0.2%、1.0%和1.5%的PMHS改性的增透膜的疏水性能得到明显地提高。Fourier红外光谱表明,与未改性SiO_2增透膜相比,改性SiO_2增透膜在1 257和796 cm^(-1)处出现归属于Si—CH_3的吸收峰,说明PMHS疏水链被成功接枝至SiO_2增透膜表面。

Poly（methylthdrogen）siloxane （PMHS） was used to modify the surface hydrophobicity of sol-gel silica antireflective （AR） coating. The effect of PMHS content in modifier solution on the properties of SiO2 AR coatings was investigated. The results show that the SiO2 AR coating modified with 0.2 % PMHS possesses the transmittance of 99.50%., and the transmittance of SiO2 A R coating decreases after modified with 1.0 % and 1.5 % PMHS. The microstructures of SiO2 AR coatings before and after modified with 0.2% PMHS are similar. After the modification with 1.5 % PMHS, the porosity of SiO2 AR coating decreases. It is indicated that the surface modification with PMHS significantly improves the hydrophobicity of AR coatings. Based on the analysis by Fourier infrared spectroscopy, the surface of SiO2 particles modified with PMHS has two additional absorption bands at 796 and 1257 cm–1, which are corresponding to the Si―CH3 stretching and bending vibrations, indicating that the hydrophobic PMHS chains are grafted onto SiO2 particles.